利用矩形薄板面内2个不同模态作为工作模态的直线型超声电机,其频率一致性和压电单元的布置方式以及激励方式对电机的性能和效率有重要的影响。该文根据电机定子的位移振型和应变振型详细分析了压电陶瓷的布置方式和激励方式,并利用参数化有限元方法(finite element method,FEM)对定子结构进行优化设计。设计制作的样机,两相工作模态频率差为270Hz,在电压峰峰值为350V、驱动频率为44.16kHz、预压力为50N的情况下,电机最大空载速度为100mm/s,最大输出力为3N。
The operating principle of a lead screw linear ultrasonic motor using bending vibration modes is analyzed. The simplified beam bending vibration model is used to analyze the dynamics characteristics of the motor. Motion trajectory equations are derived for driving points of the stator. The motor operation and driving mechanisms are investigated. The vibration modes and the construction of the motor are analyzed by using the finite element method （FEM）. A prototype motor is built and its stator dimension is 13 mm × 13 mm× 30 mm. The motor is experimentally characterized and the maximum output force of 5- 2 N is obtained.
