乙醇气体传感器的开发研究近年来引起了广泛的关注。调制传感材料的结构和表面性能是制造金属氧化物半导体气体传感器的主要考虑因素。本文采用电化学沉积的方法,制备了表面生长In2O3颗粒的ZnO纳米棒材料,材料平均长度2~3 μm,分散度良好。系统地研究了ZnO纳米棒材料的气敏性能。气敏结果表明,制备的气敏材料性能比单独的材料更好,在270℃下,对100 ppm的乙醇响应为42.3。是电沉积制备的纯ZnO纳米棒的7.8倍左右,同时有着更好的选择性。The development and research of ethanol gas sensors have attracted extensive attention in recent years. Modulating the structure and surface properties of sensing materials is the main consideration for manufacturing metal oxide semiconductor gas sensors. In this paper, ZnO nanorod materials with In2O3 particles grown on the surface were prepared by electrochemical deposition. The average length of the materials is 2~3 μm, and the dispersion is good. The gas sensing properties of ZnO nanorod materials were systematically studied. The gas sensing results show that the performance of the prepared gas sensing materials is better than that of the individual materials. At 270˚C, the response to 100 ppm ethanol is 42.3. It is about 7.8 times that of pure ZnO nanorods prepared by electrodeposition and has better selectivity at the same time.
